Characterization of wet chemistry resist and resist residues removal processes
Year of publication
1999
Authors
Muukkonen, Esa; Häkkinen, Teija; Riihisaari, Tarja; Eränen, Simo; Luusua, Ismo; Kiviranta, Arto; Savolahti, Pekka
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Häkkinen Teija
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Journal/Series
Volume
T79
Pages
255-258
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Identified topic
[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1238/Physica.Topical.079a00255
The publication is included in the Ministry of Education and Culture’s Publication data collection
No