Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches

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Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches

Year of publication

2020

Publication type

A1 Journal article –refereed

Authors

Xu, Zongwei; Liu, Lei; He, Zhongdu; Tian, Dongyu; Hartmaier, Alexander; Zhang, Junjie; Luo, Xichun; Rommel, Mathias; Nordlund, Kai; Zhang, Guoxiong; Fang, Fengzhou

Organizations and authors

Issue

9-10

Pages

3869-3880

​Publication forum

58213

​Publication forum level

1

Other information

Fields of science

Nano-technology; Physical sciences

Open access

No

Publication country

United Kingdom

Language

English

International co-publication

Yes

Co-publication with a company

No