The co-reactant role during plasma enhanced atomic layer deposition of palladium

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The co-reactant role during plasma enhanced atomic layer deposition of palladium

Year of publication

2020

Authors

Feng, Ji-Yu; Minjauw, Matthias M.; Ramachandran, Ranjith K.; Van Daele, Michiel; Poelman, Hilde; Sajavaara, Timo; Dendooven, Jolien; Detavernier, Christophe

Publication type

Publication format

Article

Parent publication type

Journal

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1

Publication channel information

Parent publication name

Parent publication editors

Conference

Volume

22

Issue

16

Pages

9124-9136

ISBN

​Publication forum

65018

​Publication forum level

2

Other information

Fields of science

Physical sciences; Chemical sciences

Open access

No

Publication country

United Kingdom

Language

English

International co-publication

true

Co-publication with a company

false

Keywords

[object Object],[object Object],[object Object],[object Object]