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Publications information icon
Superplastic Forming of LDX 2101 (EN 1.4162) Duplex Stainless Steel
Peer-reviewed
Romu, Jyrki; Yagodzinskyy, Yuriy; Beck, W.; Hänninen, Hannu
-
2004
Publications information icon
Atomic layer etching of indium tin oxide
Peer-reviewed
DOI
10.1116/6.0003170
Kauppinen, Christoffer
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
2024
Publications information icon
Diffusion and magnetization of metal adatoms on single-layer molybdenum disulfide at elevated temperatures
Peer-reviewed
Open access
DOI
10.1116/6.0003207
Zarshenas, Mohammad; Sangiovanni, Davide G.; Sarakinos, Kostas
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
2024
Publications information icon
Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon
Peer-reviewed
Open access
DOI
10.1116/6.0002705
Seppänen, Heli; Prozheev, Igor; Kauppinen, Christoffer; Suihkonen, Sami; Mizohata, Kenichiro; Lipsan...
Journal of vacuum science and technology a
2023
Publications information icon
In vacuo cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes
Peer-reviewed
Open access
DOI
10.1116/6.0002312
Nieminen, Heta-Elisa; Chundak, Mykhailo; Heikkila, Mikko J.; Karkkainen, Paloma Ruiz; Vehkamaki, Mar...
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
2023
Publications information icon
Reaction mechanism studies on atomic layer deposition process of AlF
3
Peer-reviewed
DOI
10.1116/6.0001624
Nieminen, Heta; Ritala, Mikko
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
2022
Publications information icon
Spontaneous etching of B
2
O
3
by HF gas studied using infrared spectroscopy, mass spectrometry, and density functional theory
Peer-reviewed
Open access
DOI
10.1116/6.0001542
Cano, Austin M.; Kondati Natarajan, Suresh; Partridge, Jonathan L.; Elliott, Simon D.; George, Steve...
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
2022
Publications information icon
Manipulation of thin metal film morphology on weakly interacting substrates via selective deployment of alloying species
Peer-reviewed
Open access
DOI
10.1116/6.0001700
Jamnig, Andreas; Pliatsikas, Nikolaos; Abadias, Gregory; Sarakinos, Kostas
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
2022
Publications information icon
Resonant Auger decay induced by the symmetry-forbidden 1a(1g)? 6a(1g) transition of the SF6 molecule
Peer-reviewed
DOI
10.1116/6.0001890
Santos, A. C. F.; Travnikova, O.; Boudjemia, N.; Marchenko, T.; Guillemin, R.; Ismail, I.; Koulentia...
Journal of vacuum science and technology a
2022
Publications information icon
Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
Peer-reviewed
Open access
DOI
10.1116/6.0002095
Ylivaara, Oili M. E.; Langner, Andreas; Ek, Satu; Malm, Jari; Julin, Jaakko; Laitinen, Mikko; Ali, S...
Journal of vacuum science and technology a
2022
Superplastic Forming of LDX 2101 (EN 1.4162) Duplex Stainless Steel
Peer-reviewed
2004
Atomic layer etching of indium tin oxide
Peer-reviewed
DOI
10.1116/6.0003170
2024
Diffusion and magnetization of metal adatoms on single-layer molybdenum disulfide at elevated temperatures
Peer-reviewed
Open access
DOI
10.1116/6.0003207
2024
Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon
Peer-reviewed
Open access
DOI
10.1116/6.0002705
2023
In vacuo cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes
Peer-reviewed
Open access
DOI
10.1116/6.0002312
2023
Reaction mechanism studies on atomic layer deposition process of AlF
3
Peer-reviewed
DOI
10.1116/6.0001624
2022
Spontaneous etching of B
2
O
3
by HF gas studied using infrared spectroscopy, mass spectrometry, and density functional theory
Peer-reviewed
Open access
DOI
10.1116/6.0001542
2022
Manipulation of thin metal film morphology on weakly interacting substrates via selective deployment of alloying species
Peer-reviewed
Open access
DOI
10.1116/6.0001700
2022
Resonant Auger decay induced by the symmetry-forbidden 1a(1g)? 6a(1g) transition of the SF6 molecule
Peer-reviewed
DOI
10.1116/6.0001890
2022
Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
Peer-reviewed
Open access
DOI
10.1116/6.0002095
2022
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