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Publications information icon

Synchrotron X-ray topographic study of strain in silicon wafers with integrated circuits

Peer-reviewed
DOI
10.1007/BF03040971
Karilahti, M.; Tuomi, T.; Taskinen, M.; Tulkki, J.; Lipsanen, H.; McNally, P.
Il Nuovo Cimento1997Publications information icon

Gettering in silicon-on-insulator wafers with polysilicon layer

Peer-reviewed
Savin, Hele; Yli-Koski, Marko; Haarahiltunen, Antti; Virkkala, Ville; Talvitie, Heli; Asghar, M. I.;...
MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS2009Publications information icon

(oral talk) Gettering in silicon-on-insulator wafers with polysilicon layer

Savin, Hele; Yli-Koski, Marko; Haarahiltunen, Antti; Virkkala, Ville; Talvitie, Heli; Asghar, M. I.;...
European Materials Research Society Spring Meeting2008Publications information icon

MEMS on cavity-SOI wafers

Peer-reviewed
DOI
10.1016/j.sse.2007.01.007
Luoto, Hannu; Henttinen, Kimmo; Suni, Tommi; Dekker, James; Mäkinen, Jari; Torkkeli, Altti
Solid-State Electronics2007Publications information icon

SOI wafers with buried cavities

Peer-reviewed
Suni, Tommi; Henttinen, Kimmo; Dekker, James; Luoto, Hannu; Kulawski, Martin; Mäkinen, J.; Mutikaine...
ECS Proceedings Volumes2005Publications information icon

Characterisation of photodetectors on wafers

Remes, Kari & Palmu, Leena
-2002Publications information icon

Conoscopic interferometry of SAW-wafers

Äyräs, P.; Laine, J.-P.; Fagerholm, J.; Friberg, Ari; Kaivola, M.; Siren, E.; Tervonen, E.; Salomaa,...
-1995Publications information icon

Direct bonding of oxidized cavity wafers

Peer-reviewed
DOI
10.1149/1.2982900
Palokangas, M.; Dekker, James; Henttinen, Kimmo; Mäkmen, J.
ECS Transactions2008Publications information icon

Silicon-on-insulator wafers with buried cavities

Peer-reviewed
DOI
10.1149/1.2167955
Suni, Tommi; Henttinen, Kimmo; Dekker, James; Luoto, Hannu; Kulawski, Martin; Mäkinen, J.; Mutikaine...
Journal of the Electrochemical Society2006Publications information icon

New methods to fabricate multilayer silicon wafers

Henttinen, Kimmo
Industrial Horizons2002

Synchrotron X-ray topographic study of strain in silicon wafers with integrated circuits

Peer-reviewed
DOI
10.1007/BF03040971
1997

Gettering in silicon-on-insulator wafers with polysilicon layer

Peer-reviewed
2009

(oral talk) Gettering in silicon-on-insulator wafers with polysilicon layer

2008

MEMS on cavity-SOI wafers

Peer-reviewed
DOI
10.1016/j.sse.2007.01.007
2007

SOI wafers with buried cavities

Peer-reviewed
2005

Characterisation of photodetectors on wafers

2002

Conoscopic interferometry of SAW-wafers

1995

Direct bonding of oxidized cavity wafers

Peer-reviewed
DOI
10.1149/1.2982900
2008

Silicon-on-insulator wafers with buried cavities

Peer-reviewed
DOI
10.1149/1.2167955
2006

New methods to fabricate multilayer silicon wafers

2002