Molecular Layer Deposition

Year of publication

2013

Authors

Cameron David;Ivanova Tatiana

Organizations and authors

LUT University

Cameron David

Ivanova Tatyana

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

ECS Transactions

Volume

Issue

Pages

263-275

ISSN

1938-5862

Publication forum

55028

Publication forum level

Open access

Open access in the publisher’s service

Self-archived

Unknown

Other information

Fields of science

Chemical sciences

Identified topic

[object Object]

Publication country

United States

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company