Influence of atomic layer deposition chemistry on high-k dielectrics for charge trapping memories

Year of publication

2012

Authors

Nikolaou, Nikolaos; Dimitrakis, Panagiotis; Normand, Pascal; Ioannou-Sougleridis, Vassilios; Giannakopoulos, Konstantinos; Mergia, Konstantina; Kukli, Kaupo; Niinistö, Jaakko; Ritala, Mikko; Leskelä, Markku

Organizations and authors

University of Helsinki

Niinistö Jaakko

Kukli Kaupo

Leskelä Markku

Ritala Mikko

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Solid-State Electronics

Parent publication name

Solid-State Electronics

Volume

Pages

38-47

ISSN

0038-1101

Publication forum

67380

Open access

Open access in the publisher’s service

No information

Self-archived

Unknown

Other information

Fields of science

Chemical sciences

Identified topic

[object Object]

Publication country

United Kingdom

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company