Anomalous oxygen precipitation in Czochralski-grown silicon wafers
Year of publication
1996
Authors
Rantamäki, R.; Tuomi, T.; Taskinen, M.; Tilli, M.; McNally, P.; Curley, J.; Danilewsky, A.; Schropp, B.
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Compilation
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A3 Book section, Chapters in research booksPublication channel information
Parent publication name
Pages
709
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Keywords
[object Object],[object Object]
Identified topic
[object Object]
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes