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Air damping of oscillating MEMS structures: Modeling and comparison with experiment

Year of publication

2013

Authors

Gorelick, Sergey; Dekker, James R; Leivo, Mikko; Kantojärvi, Uula

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Dekker James R

Leivo Mikko

Gorelick Sergey

Kantojärvi Uula

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Parent publication name

Proceedings of the COMSOL 2013 conference

Conference

COMSOL Conference, Rotterdam

Open access

Open access in the publisher’s service

Yes

Self-archived

No

Other information

Fields of science

Electronic, automation and communications engineering, electronics

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object]

Identified topic

[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes