< Back to search results

Atomic layer deposition

Year of publication

2025

Authors

Kessels, Erwin; Devi, Anjana; Park, Jin-Seong; Ritala, Mikko; Yanguas-Gil, Angel; Wiemer, Claudia

Organizations and authors

University of Helsinki

Ritala Mikko

Publication type

Publication format

Article

Report

No

Parent publication type

Journal

Article type

Review article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A2 Review article, Literature review, Systematic review

Publication channel information

Journal/Series

Nature Reviews Methods Primers

Parent publication name

Nature Reviews Methods Primers

Volume

5

Issue

1

Article number

66

ISSN

Publication forum

Publication forum level

1

Open access

Open access in the publisher’s service

No

Open access of publication channel

Partially open publication channel

Self-archived

Yes

Other information

Fields of science

Chemical sciences

Identified topic

[object Object]

Publication country

United Kingdom

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company

No

DOI

10.1038/s43586-025-00435-6

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes