Structural Data for the Zincone ALD/MLD Hybrid Thin Film Growth Reactions
Description
Dataset containing zincone ALD/MLD hybrid thin film structures modeled using DFT.
Year of publication
2023
Authors
Department of Chemistry and Materials Science
Mario Mäkinen 
Harvard Dataverse - Publisher
Other information
Fields of science
Chemical engineering
Open access
Open
License
Creative Commons Attribution 4.0 International (CC BY 4.0)