Description of the files Files are named by the same figure order appearing in the paper and supplementary material. File types contain: - *.csv: Comma separated values. - *.fibps: Raw data obtained with the 3D optical profilometer, which can be opened and analyzed by ProfilmOnline at https://www.profilmonline.com/. Figures shown in the paper were croped from the top-left corner with areas of about 60x60 µm2 from the raw data. Alternatively all 3D profilometer data shown in the paper can be obtained and analyzed in https://www.profilmonline.com/shared-folder?token=S32NP82HtLC3 - *.tif: Image generated from scanning electron microscope. Original paper: https://doi.org/10.1063/5.0213637 Supplementary material: https://doi.org/10.60893/figshare.apl.c.7322108 When using the dataset, please cite the original paper: Xiaolong Liu, Patrick McKearney, Sören Schäfer, Behrad Radfar, Yonder Berencén, Ulrich Kentsch, Ville Vähänissi, Shengqiang Zhou, Stefan Kontermann, Hele Savin; Impact of post-ion implantation annealing on Se-hyperdoped Ge. Appl. Phys. Lett. 22 July 2024; 125 (4): 042102. https://doi.org/10.1063/5.0213637.

2024