Artificial Neural Network Assisted Spectral Scatterometry For Grating Quality Control

Description

Data related to the ANN assisted spectral scatterometry project. The dataset contains the simulated and measured diffraction efficiencies with which the ANN was trained (A/B/C_training files). In addition there are diffraction efficiencies that are simulated using the specifications of the measured samples (v1_A/B_256.h5), the spectrum of the light source, uncertainty calculations, and the trained ANN itself (TLModel_4.13) created using Tensorflow and Keras for Python.

Year of publication

2024

Type of data

Authors

VTT Technical Research Centre of Finland Ltd - Publisher

Aleksi Mattila - Creator

Project

Other information

Fields of science

Language

Open access

Open

License

Creative Commons Attribution 4.0 International (CC BY 4.0)

Keywords

diffraction, gratings, inverse modeling, scatterometry, transfer learning

Subject headings

Temporal coverage

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