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ALD on particles: Literature collection and dataset

Aristeidis Goulas, Chen Mingliang, J. Ruud van Ommen, Peter Michael Piechulla, Riikka Puurunen2024

Simulated thickness profiles of ALD film in a wide microchannel of 500 nm height published as Fig.4 in PCCP 24 (2022) 8645-8660

Emma Verkama, Jihong Yim, Riikka L. Puurunen2023

DReaM-ALD – Diffusion-Reaction Model for Atomic Layer Deposition

Emma Verkama, Riikka L. Puurunen2023

ALD Al2O3 thickness profile in microscopic rectangular channel, TMA-water 300 degC 500 cycles, PillarHall(TM) LHAR3-1b, V0001

Jaana Marles, Oili Ylivaara, Riikka Puurunen2021

Examples of ALD saturation profiles in rectangular channel LHAR structures simulated with a diffusion-reaction model

Emma Verkama, Jihong Yim, Jonna Piironen, Riikka L. Puurunen2020