Atomic Layer Deposition and Characterization of Dysprosium-Doped Zirconium Oxide Thin Films

Year of publication

2015

Authors

Tamm, Aile; Kozlova, Jekaterina; Arroval, Tonis; Aarik, Lauri; Ritslaid, Peeter; Garcia, Hector; Castan, Helena; Duenas, Salvador; Kukli, Kaupo; Aarik, Jaan

Organizations and authors

University of Helsinki

Kukli Kaupo

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Chemical Vapor Deposition

Parent publication name

Chemical Vapor Deposition

Volume

Issue

7-9

Pages

181-187

ISSN

0948-1907

Publication forum

60588

Publication forum level

Open access

Open access in the publisher’s service

No information

Self-archived

Unknown

Other information

Fields of science

Physical sciences; Chemical sciences

Publication country

Germany

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company