Atomic layer deposition of zirconium dioxide from zirconium tetrachloride and ozone

Year of publication

2015

Authors

Kukli, Kaupo; Kemell, Marianna; Köykkä, Joel; Mizohata, Kenichiro; Vehkamaki, Marko; Ritala, Mikko; Leskela, Markku

Organizations and authors

University of Helsinki

Kemell Marianna

Kukli Kaupo

Mizohata Kenichiro

Leskela Markku

Vehkamaki Marko

Ritala Mikko

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Thin Solid Films

Parent publication name

Thin Solid Films

Volume

589

Pages

597-604

ISSN

0040-6090

Publication forum

68419

Publication forum level

Open access

Open access in the publisher’s service

No information

Self-archived

Unknown

Other information

Fields of science

Physical sciences; Chemical sciences

Publication country

Switzerland

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company