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Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

Year of publication

2014

Authors

Blanquart, Timothee; Kaipio, Mikko; Niinistö, Jaakko; Gavagnin, Marco; Longo, Valentino; Blanquart, Laurie; Lansalot, Clement; Noh, W.; Wanzenböck, Heinz D.; Ritala, Mikko; Leskelä, Markku

Organizations and authors

University of Helsinki

Niinistö Jaakko

Leskelä Markku

Kaipio Mikko

Ritala Mikko

Blanquart Timothee

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Chemical Vapor Deposition

Parent publication name

Chemical Vapor Deposition

Volume

20

Issue

7-9

Pages

217-223

ISSN

0948-1907

​Publication forum

53322

​Publication forum level

2

Open access

Open access in the publisher’s service

No information

Self-archived

Unknown

Other information

Fields of science

Chemical sciences

Publication country

Germany

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company

Unknown

DOI

10.1002/cvde.201407116

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes