Precursors as enablers of ALD technology:Contributions from University of Helsinki

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Precursors as enablers of ALD technology:Contributions from University of Helsinki

Year of publication

2013

Authors

Hatanpää, Timo Tapio; Ritala, Mikko; Leskelä, Markku

Organizations and authors

University of Helsinki

Leskelä Markku

Ritala Mikko

Hatanpää Timo Tapio

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Coordination Chemistry Reviews

Parent publication name

Coordination Chemistry Reviews

Volume

257

Issue

23-24

Pages

3297-3322

ISSN

0010-8545

​Publication forum

54123

​Publication forum level

2

Open access

Open access in the publisher’s service

No information

Self-archived

Unknown

Other information

Fields of science

Chemical sciences

Publication country

Netherlands

Internationality of the publisher

International

Language

English

International co-publication

No

Co-publication with a company

Unknown

DOI

10.1016/j.ccr.2013.07.002

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes
Precursors as enablers of ALD technology:Contributions from University of Helsinki - Research.fi