History of atomic layer deposition and its relationship with the American Vacuum Society

Year of publication

2013

Authors

Parsons, Gregory N.; Elam, Jeffrey W.; George, Steven M.; Haukka, Suvi; Jeon, Hyeongtag; Kessels, W. M. M. (Erwin); Leskelä, Markku; Poodt, Paul; Ritala, Mikko; Rossnagel, Steven M.

Organizations and authors

University of Helsinki

Leskelä Markku

Ritala Mikko

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Journal of vacuum science & technology : an official journal of the American Vacuum Society

Parent publication name

Journal of vacuum science & technology : an official journal of the American Vacuum Society

Volume

Issue

Pages

50818

ISSN

0734-2101

Publication forum

62085

Publication forum level

Open access

Open access in the publisher’s service

No information

Self-archived

Unknown

Other information

Fields of science

Chemical sciences

Publication country

United States

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company