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New Fabrication Technologies For Microprocess Devices

Year of publication

2011

Authors

Hirvimäki, Marika; Manninen, Matti; Piili, Heidi; Salminen, Antti

Organizations and authors

LUT University

Salminen Antti

Piili Heidi

Hirvimäki Marika

Manninen Matti

Publication type

Publication format

Monograph

Audience

Professional

MINEDU's publication type classification code

D4 Published development or research report or study

Publication channel information

Journal

Research report/Faculty of Technology, Mechanical Engineering

Publisher

Laserlaboratorio

Pages

98

Open access

Open access in the publisher’s service

No information

Self-archived

Unknown

Other information

Fields of science

Mechanical engineering

Publication country

Finland

Language

English

International co-publication

No

Co-publication with a company

Unknown

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes