Introduction: basic features and historical development of atomic layer deposition
Year of publication
2012
Authors
Niinistö, Jaakko; Niinistö, Lauri
Organizations and authors
University of Helsinki
Niinistö Jaakko
Publication type
Publication format
Article
Parent publication type
Compilation
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A3 Book section, Chapters in research booksPublication channel information
Parent publication name
Publisher
ISBN
Publication forum
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Chemical sciences
Publication country
Germany
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes