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Glass Polarization Induced Drift in Microelectromechanical Capacitor

Year of publication

2012

Authors

Haarahiltunen, Antti; Varpula, Aapo; Leinvuo, Jouni; Siren, Esko; Rytkönen, Vesa-Pekka; Savin, Hele

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Varpula Aapo Orcid -palvelun logo

Aalto University

Savin Hele Orcid -palvelun logo

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Journal of applied physics

Volume

111

Issue

10

Article number

103523

ISSN

0021-8979

​Publication forum

59616

​Publication forum level

2

Open access

Open access in the publisher’s service

Yes

Open access of publication channel

Fully open publication channel

Self-archived

Yes

Other information

Fields of science

Physical sciences; Chemical sciences; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology; Medical biotechnology

Keywords

[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

No

Co-publication with a company

Yes

DOI

10.1063/1.4720378

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes