Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques

Year of publication

2014

Authors

Berdova, Maria; Ylitalo, Tuomo; Kassamakov, Ivan; Heino, Jouni; Törmä, Pekka; Kilpi, Lauri; Ronkainen, Helena; Koskinen, Jari; Hæggström, Edward; Franssila, Sami

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Ronkainen Helena

Kilpi Lauri

Aalto University

Koskinen Jari

Berdova Maria

Franssila Sami

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Acta materialia

Volume

Pages

370-377

ISSN

1359-6454

Publication forum

50285

Publication forum level

Open access

Open access in the publisher’s service

Self-archived

Other information

Fields of science

Materials engineering; Nanotechnology

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company

DOI

10.1016/j.actamat.2013.11.024

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes