Infrared Scanning White Light Interferometry Using a Solid State Light Source
Year of publication
2011
Authors
Heikkinen, Ville; Aaltonen, Juha Pekka; Wälchli, Ben; Räikkönen, Heikki; Kassamakov, Ivan Vladislavov; Cholakova, Tania; Grigoras, Kestutis; Franssila, Sami; Kakanakov, Roumen; Haeggström, Edward
Organizations and authors
Aalto University
Franssila Sami 
University of Helsinki
Wälchli Ben
Haeggström Edward
Räikkönen Heikki
Kassamakov Ivan Vladislavov
Aaltonen Juha Pekka
Heikkinen Ville
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Journal/Series
Proceedings of SPIE
Parent publication name
SPIE Photonics West, Proc. SPIE 7928, San Francisco, California, USA, 22 27 January 2011
Volume
7928
Pages
792809-1 - 792809-9
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Physical sciences; Materials engineering; Nanotechnology
Publication country
United States
Internationality of the publisher
International
Language
English
International co-publication
Yes
Co-publication with a company
No
DOI
10.1117/12.874966
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes