Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration
Year of publication
2020
Authors
Bespalova, Kristina; Ross, Glenn; Paulasto-Kröckel, Mervi; Thanniyil, Abhilash Sebastian; Karuthedath, Cyril; Mertin, Stefan; Pensala, Tuomas
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Karuthedath Cyril 
Mertin Stefan
Abhilash T.S.
Pensala Tuomas
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Journal/Series
Parent publication name
Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020
Conference
Publisher
Article number
9251496
ISSN
ISBN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
Yes
Other information
Fields of science
Electronic, automation and communications engineering, electronics; Mechanical engineering
Identified topic
[object Object]
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1109/IUS46767.2020.9251496
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes