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Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition

Year of publication

2016

Authors

Mattinen, Miika; Hämäläinen, Jani; Gao, Feng; Jalkanen, Pasi; Mizohata, Kenichiro; Räisänen, Jyrki; Puurunen, Riikka L.; Ritala, Mikko; Leskelä, Markku

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Gao Feng

Puurunen Riikka

University of Helsinki

Hämäläinen Jani

Räisänen Jyrki

Mizohata Kenichiro

Leskelä Markku

Mattinen Miika

Ritala Mikko

Jalkanen Pasi

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Langmuir

Parent publication name

Langmuir

Volume

32

Issue

41

Pages

10559-10569

ISSN

0743-7463

​Publication forum

62432

​Publication forum level

2

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Physical sciences; Chemical sciences; Materials engineering

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Publication country

United States

Internationality of the publisher

International

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1021/acs.langmuir.6b03007

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes