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Processing of n(+)/p(-)/p(+) strip detectors with atomic layer deposition (ALD) grown Al2O3 field insulator on magnetic Czochralski silicon (MCz-si) substrates

Year of publication

2016

Authors

Härkönen, J.; Tuovinen, Esa; Luukka, P.; Gädda, A.; Mäenpää, T.; Tuominen, E.; Arsenovich, T.; Junkes, A.; Wu, X.; Li, Z.

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Tuovinen Esa

Wu X.

University of Helsinki

Gädda A.

Tuovinen E.

Arsenovich T.

Tuominen E.

Luukka P.

Härkönen J.

Mäenpää T.

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Nuclear instruments and methods in physics research section A: accelerators, spectrometers, detectors and associated equipment

Parent publication name

Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment

Volume

828

Pages

46-51

ISSN

0168-9002

​Publication forum

64244

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Physical sciences; Electronic, automation and communications engineering, electronics

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object]

Publication country

Netherlands

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company

Yes

DOI

10.1016/j.nima.2016.04.069

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes