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Ambient pressure x-ray photoelectron spectroscopy setup for synchrotron-based in situ and operando atomic layer deposition research

Year of publication

2022

Authors

Kokkonen, E.; Kaipio, Mikko; Nieminen, H. E.; Rehman, F.; Miikkulainen, V.; Putkonen, M.; Ritala, Mikko; Huotari, S.; Schnadt, J.; Urpelainen, S.

Organizations and authors

Aalto University

Miikkulainen Ville Orcid -palvelun logo

University of Oulu

Urpelainen Samuli Orcid -palvelun logo

University of Helsinki

Nieminen H. -E

Kaipio M.

Putkonen M.

Ritala M.

Huotari S.

Miikkulainen V.

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Review of scientific instruments

Parent publication name

Review of Scientific Instruments

Publisher

American Institute of Physics

Volume

93

Issue

1

Article number

013905

ISSN

0034-6748

​Publication forum

66242

​Publication forum level

1

Open access

Open access in the publisher’s service

Yes

Open access of publication channel

Partially open publication channel

License of the publisher’s version

CC BY

Self-archived

Yes

License of the self-archived publication

CC BY

Other information

Fields of science

Physical sciences; Chemical sciences; Chemical engineering; Materials engineering; Nanotechnology

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Publication country

United States

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company

No

DOI

10.1063/5.0076993

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes