Effects of ultra-high vacuum treatments on n-type Si contact resistivity
Year of publication
2025
Authors
Miettinen, Mikko; Vuorinen, Esa; Lehtio, Juha-Pekka; Rad, Zahra Jahanshah; Punkkinen, Risto; Kuzmin, Mikhail; Jarvinen, Jarno; Vahanissi, Ville; Laukkanen, Pekka; Savin, Hele; Kokko, Kalevi
Organizations and authors
University of Turku
Vuorinen Esa
Lehtiö Juha-Pekka
Punkkinen Risto
Kokko Kalevi
Kuzmin Mikhail
Miettinen Mikko
Laukkanen Pekka
Jahanshah Rad Zahra
Järvinen Jarno
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Journal
Publisher
Volume
695
Article number
162790
ISSN
Publication forum
Publication forum level
2
Open access
Open access in the publisher’s service
Yes
Open access of publication channel
Partially open publication channel
Self-archived
Yes
Other information
Fields of science
Physical sciences; Materials engineering
Keywords
[object Object],[object Object],[object Object],[object Object]
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1016/j.apsusc.2025.162790
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes