Joint Research on Scatterometry and AFM Wafer Metrology
Year of publication
2011
Authors
Bodermann Bernd, Buhr Egbert, Danzebrink Hans-Ulrich, Bär Markus, Scholze Frank, Krumrey Michael, Wurm Matthias, Klapetek Petr, Hansen Poul-Erik, Korpelainen Virpi, Veghel Marijn van, Yacoot Andrew, Siitonen Samuli, Gawhary Omar el, Burger Sven, Saastamoinen Toni
Show moreOrganizations and authors
University of Eastern Finland
Saastamoinen Toni
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Non Peer-ReviewedMINEDU's publication type classification code
B3 Article in conference proceedings (non-peer-reviewed)Publication channel information
Parent publication name
FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011
Publisher
American Institute of Physics
Volume
1395
Pages
319-323
ISBN
Open access
Open access in the publisher’s service
Yes
Open access of publication channel
Fully open publication channel
Self-archived
Unknown
Other information
Fields of science
Physical sciences
Identified topic
[object Object]
Publication country
France
Internationality of the publisher
International
Language
English
International co-publication
Yes
Co-publication with a company
Unknown
DOI
10.1063/1.3657910
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes