Evaluation of scatterometry for characterisation of hybrid optics
Year of publication
2012
Authors
Lassila Antti, Bodermann Bernd, Turunen Jari, Hansen Poul-Erik, Wurm Matthias, Siitonen Samuli, Saastamoinen Toni, Husu Hannu, Korpelainen Virpi
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Non Peer-ReviewedMINEDU's publication type classification code
B3 Article in conference proceedings (non-peer-reviewed)Publication channel information
Parent publication name
ISBN
Publication forum
Open access
Open access in the publisher’s service
No information
Self-archived
Unknown
Other information
Fields of science
Physical sciences
Publication country
United Kingdom
Internationality of the publisher
International
Language
English
International co-publication
Yes
Co-publication with a company
Unknown
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes