Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Year of publication

2012

Authors

Puurunen, R. L.; Häärä, A.; Saloniemi, H.; Dekker, J.; Kainlauri, M.; Pohjonen, H.; Suni, T.; Kiihamäki, J.; Santala, E.; Leskelä, M.; Kattelus, H.

Organizations and authors

University of Helsinki

Santala E.

Leskelä M.

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Sensors and actuators A: Physical

Parent publication name

Sensors and Actuators A: Physical

Volume

188

Pages

24-245

ISSN

0924-4247

Publication forum

67021

Open access

Open access in the publisher’s service

No information

Self-archived

Unknown

Other information

Fields of science

Chemical sciences; Chemical engineering

Publication country

Switzerland

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company