Cycloheptatrienyl-Cyclopentadienyl Heteroleptic Precursors for Atomic Layer Deposition of Group 4 Oxide Thin Films
Year of publication
2012
Authors
Niinisto, Jaakko; Hatanpää, Timo Tapio; Kariniemi, Maarit; Mäntymäki, Miia; Costelle, Leila; Mizohata, Kenichiro; Kukli, Kaupo; Ritala, Mikko; Leskelä, Markku
Organizations and authors
University of Helsinki
Niinisto Jaakko
Kukli Kaupo
Mizohata Kenichiro
Costelle Leila
Kariniemi Maarit
Leskelä Markku
Mäntymäki Miia
Ritala Mikko
Hatanpää Timo Tapio
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Journal
Parent publication name
Volume
24
Issue
11
Pages
22-28
ISSN
Publication forum
Open access
Open access in the publisher’s service
No information
Self-archived
Unknown
Other information
Fields of science
Physical sciences; Chemical sciences
Publication country
United States
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
Unknown
DOI
10.1021/cm2030735
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes