Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)
Year of publication
2016
Authors
Autere A, Karvonen L, Säynätjoki A, Roussey M, Roenn J, Färm E, Kemell M, Tu X, Liow T-Y, Lo P, Ritala M, Leskelä M, Lipsanen H, Honkanen S, Sun Z
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Compilation
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A3 Book section, Chapters in research booksPublication channel information
Journal/Series
Parent publication name
Proc. SPIE 9891, Silicon Photonics and Photonic Integrated Circuits V
Publisher
Article number
10.1117/12.2227097
Pages
98910J
ISSN
Publication forum
Publication forum level
0
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Physical sciences
Internationality of the publisher
International
International co-publication
Yes
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes