Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materials
Year of publication
2015
Authors
Klepper, Karina B; Miikkulainen, Kimmo Ville Antero; Nilsen, Ola; Fjellvåg, Helmer; Liu, Ming; Dutta, Dhanadeep; Gidley, David; Lanford, William; Ross, Liza; Li, Han; King, Sean W
Organizations and authors
University of Helsinki
Miikkulainen Kimmo Ville Antero
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Journal/Series
Parent publication name
Volume
1791
Pages
15-20
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Nanotechnology
Keywords
[object Object],[object Object],[object Object]
Publication country
United States
Internationality of the publisher
International
Language
English
International co-publication
Yes
Co-publication with a company
No
DOI
10.1557/opl.2015.519
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes