Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures
Year of publication
2017
Authors
Hansen Poul-Erik, Madsen Morten H, Lehtolahti Joonas, Nielsen Lars
Organizations and authors
University of Eastern Finland
Lehtolahti Joonas
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Journal/Series
Volume
421
Issue
Part B
Article number
10.1016/j.apsusc.2017.02.091
Pages
471-479
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
Yes
Other information
Fields of science
Physical sciences
Internationality of the publisher
International
International co-publication
Yes
Co-publication with a company
No
DOI
10.1016/j.apsusc.2017.02.091
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes