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Metal oxide multilayer hard mask system for 3D nanofabrication

Year of publication

2018

Authors

Han, Zhongmei; Vehkamäki, Marko ; Salmi, Emma; Leskelä, Markku ; Ritala, Mikko

Organizations and authors

University of Helsinki

Leskelä Markku

Vehkamäki Marko

Ritala Mikko

Han Zhongmei

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Nanotechnology

Parent publication name

Nanotechnology

Volume

29

Issue

5

Article number

055301

ISSN

0957-4484

​Publication forum

63717

​Publication forum level

2

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Chemical sciences; Nanotechnology

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Publication country

United Kingdom

Internationality of the publisher

International

Language

English

International co-publication

No

Co-publication with a company

Yes

DOI

10.1088/1361-6528/aa9fe0

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes