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Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision

Year of publication

2019

Authors

Silander, Isak; Hausmaninger, Thomas; Forssén, Clayton; Zelan, Martin; Axner, Ove

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Hausmaninger Thomas

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Review article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A2 Review article, Literature review, Systematic review

Publication channel information

Journal/Series

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

Volume

37

Issue

4

Article number

042901

ISSN

Publication forum

Publication forum level

1

Open access

Open access in the publisher’s service

Yes

Self-archived

No

Other information

Fields of science

Physical sciences; Materials engineering

Language

English

International co-publication

Yes

Co-publication with a company

No

DOI

10.1116/1.5090860

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes