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Scatterometer for characterization of diffractive optical elements

Year of publication

2014

Authors

Husu, Hannu; Saastamoinen, T.; Laukkanen, J.; Siitonen, S.; Turunen, J.; Lassila, Antti

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Lassila Antti Orcid -palvelun logo

Husu Hannu

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Measurement Science and Technology

Volume

25

Issue

4

Article number

044019

ISSN

0957-0233

​Publication forum

63079

​Publication forum level

2

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Physical sciences

Keywords

[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1088/0957-0233/25/4/044019

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes