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MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range

Year of publication

2014

Authors

Mäkynen, Jussi H.; Tuohiniemi, Mikko; Näsilä, Antti; Mannila, Rami; Antila, Jarkko E.

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Näsilä Antti

Antila Jarkko E.

Mäkynen Jussi H.

Tuohiniemi Mikko

Mannila Rami

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Journal/Series

Proceedings of SPIE

Parent publication name

MOEMS and Miniaturized Systems XIII

Conference

SPIE Photonics West 2014

Publisher

International Society for Optics and Photonics SPIE

Article number

89770U

ISSN

0277-786X

ISBN

978-0-8194-9890-8

​Publication forum

71479

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Electronic, automation and communications engineering, electronics

Keywords

[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1117/12.2036272

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes