Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope
Year of publication
2012
Authors
Korpelainen, Virpi; Seppä, Jeremias; Lassila, Antti
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Volume
11
Issue
1
Article number
011002
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Physical sciences
Keywords
[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1117/1.JMM.11.1.011002
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes