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Fabrication of photonic crystal waveguide elements on SOI

Year of publication

2003

Authors

Yliniemi, Sanna; Aalto, Timo; Heimala, Päivi; Pekko, Panu; Jefimovs, Konstantins; Uusitupa, Tero

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Pekko Panu

Heimala Päivi Orcid -palvelun logo

Yliniemi Sanna

Aalto Timo Orcid -palvelun logo

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Journal/Series

Proceedings of SPIE

Parent publication name

Integrated Optical Devices: Fabrication and Testing

Conference

Photonics Fabrication Europe 2002 (PFE'02)

Publisher

International Society for Optics and Photonics SPIE

Pages

23-31

ISSN

0277-786X

ISBN

978-0-8194-4739-5

​Publication forum

71479

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Electronic, automation and communications engineering, electronics

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1117/12.468303

The publication is included in the Ministry of Education and Culture’s Publication data collection

No