Nanoimprinting polyimide and polymer multilayers
Year of publication
2011
Authors
Kolari, Kai; Haatainen, Tomi; Ylinen, Sami; Aalto, Timo
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Parent publication name
Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
Conference
22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011
Publisher
Vestfold University College
Pages
73-76
ISBN
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Keywords
[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes