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Effect of Shot Number on Femtosecond Laser Drilling of Silicon

Year of publication

2010

Authors

Laakso, Petri; Penttilä, Raimo; Heimala, Päivi

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Heimala Päivi

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Journal of Laser Micro Nanoengineering

Volume

5

Issue

3

Pages

273-276

ISSN

Publication forum

Publication forum level

1

Open access

Open access in the publisher’s service

Yes

Self-archived

No

Other information

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.2961/jlmn.2010.03.0017

The publication is included in the Ministry of Education and Culture’s Publication data collection

No