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Design and characterization of MIKES metrological atomic force microscope

Year of publication

2010

Authors

Korpelainen, Virpi; Seppä, Jeremias; Lassila, Antti

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Lassila Antti Orcid -palvelun logo

Seppä Jeremias Orcid -palvelun logo

Korpelainen Virpi Orcid -palvelun logo

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Volume

34

Issue

4

Pages

735-744

​Publication forum

65362

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Physical sciences

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1016/j.precisioneng.2010.04.002

The publication is included in the Ministry of Education and Culture’s Publication data collection

No