CMOS-integrated film bulk acoustic resonators for label-free biosensing

Year of publication

2010

Authors

Nirschl, Martin; Rantala, Arto; Tukkiniemi, Kari; Auer, Sanna; Hellgren, Ann-Charlotte; Pitzer, Dana; Schreiter, Matthias; Vikholm-Lundin, Inger

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Rantala Arto

Vikholm-Lundin Inger

Tukkiniemi Kari

Auer Sanna

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Sensors

Volume

Issue

Pages

4180-4193

ISSN

1424-8220

Publication forum

67020

Publication forum level

Open access

Open access in the publisher’s service

Yes

Open access of publication channel

Fully open publication channel

Self-archived

Other information

Fields of science

Electronic, automation and communications engineering, electronics

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

Yes

Co-publication with a company

Yes

DOI

10.3390/s100504180