Wafer-level transfer technologies for PZT-based RF MEMS switches

Year of publication

2010

Authors

Guerre, R.; Drechsler, U.; Bhattacharyya, D.; Rantakari, Pekka; Stutz, R.; Wright, R.V.; Milosavljevic, Z.D.; Vähä-Heikkilä, Tauno; Kirby, P.B.; Despont, M.

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Rantakari Pekka

Vähä-Heikkilä Tauno

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Journal of Microelectromechanical Systems

Volume

Issue

Pages

548-560

ISSN

1057-7157

Publication forum

61025

Publication forum level

Open access

Open access in the publisher’s service

Self-archived

Other information

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

Co-publication with a company

DOI

10.1109/JMEMS.2010.2047005