AFM, SEM, XPS and RHEED investigation of TiO2 thin films grown by atomic layer deposition
Year of publication
1997
Authors
Sammelselg, V.; Rosental, A.; Tarre, A.; Niinistö, L.; Johansson, L.-S.; Uustare, T.
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Parent publication name
The 4th Baltic Symposium on Atomic Layer Epitaxy, Tartto, Viro, 10.-11.10.1997
Pages
17
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Keywords
AFM; atomic layer deposition; RHEED; SEM; thin film; titanium oxide; XPS
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes