Silicon Nanopillars Formed by Reactive Ion Etching Using Self-Organized Gold Mask

Year of publication

1999

Authors

Ovchinnikov, V.; Malinin, A.; Novikov, S.; Tuovinen, C.

Organizations and authors

Aalto University

Tuovinen Charlotta

Novikov Serguei

Ovchinnikov Victor

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Physica Scripta

Publisher

Institute of Physics Publishing

Volume

T79

Pages

263-265

Open access

Open access in the publisher’s service

Self-archived

Other information

Keywords

[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes