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Gettering in silicon-on-insulator wafers with polysilicon layer

Year of publication

2009

Authors

Savin, Hele; Yli-Koski, Marko; Haarahiltunen, Antti; Virkkala, Ville; Talvitie, Heli; Asghar, M. I.; Sinkkonen, Juha

Organizations and authors

Aalto University

Savin Hele Orcid -palvelun logo

Haarahiltunen Antti

Talvitie Heli

Asghar Imran

Yli-Koski Marko

Virkkala Ville

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS

Publisher

Elsevier BV

Volume

159-160

Issue

C

Pages

259-263

ISSN

0921-5107

​Publication forum

62994

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Physical sciences; Chemical sciences; Medical biotechnology; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

No

Co-publication with a company

No

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes